JPH0366141U - - Google Patents

Info

Publication number
JPH0366141U
JPH0366141U JP12662589U JP12662589U JPH0366141U JP H0366141 U JPH0366141 U JP H0366141U JP 12662589 U JP12662589 U JP 12662589U JP 12662589 U JP12662589 U JP 12662589U JP H0366141 U JPH0366141 U JP H0366141U
Authority
JP
Japan
Prior art keywords
permanent magnet
plasma
ion source
magnet
arc
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12662589U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12662589U priority Critical patent/JPH0366141U/ja
Publication of JPH0366141U publication Critical patent/JPH0366141U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP12662589U 1989-10-31 1989-10-31 Pending JPH0366141U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12662589U JPH0366141U (en]) 1989-10-31 1989-10-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12662589U JPH0366141U (en]) 1989-10-31 1989-10-31

Publications (1)

Publication Number Publication Date
JPH0366141U true JPH0366141U (en]) 1991-06-27

Family

ID=31674430

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12662589U Pending JPH0366141U (en]) 1989-10-31 1989-10-31

Country Status (1)

Country Link
JP (1) JPH0366141U (en])

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